| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining method, a laser beam machining apparatus, and a method for producing the same, for surely forming a reformed region to be the starting point of cutting. <P>SOLUTION: Laser beam L modulated by a reflection type spatial light modulator 203 is emitted to a workpiece so that the aberration of the laser beam L condensed on the inside of the workpiece 1 is controlled to be equal to or less than a predetermined value. Thus, the aberration of the laser beam L generated at the position where the condensing point P of the laser beam L is focused is reduced as far as possible, and the energy density of the laser beam L at the position is increased and the reformed region 7 having a high function as the starting point of cutting can be formed. Further, since the reflection type spatial light modulator 203 is used, utilization efficiency of the laser beam L can be improved compared with a transmission type spatial light modulator. The improvement of the utilization efficiency of the laser beam L is particularly important when the reformed region 7 to be the starting point of the cutting is formed on a plate-like workpiece 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
