| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprint device capable of accurately transferring a pattern at a target position obtained by global alignment. <P>SOLUTION: An imprint device presses at least either one of a transfer material applied on a substrate or a die having a pattern against the other to transfer the pattern. The imprint device comprises a detecting portion 6 which detects a mark 4 of a die 2, and marks 5 on a substrate 1 corresponding to a target transfer position calculated by detecting the plurality of the marks 5 formed on the substrate 1; and a control portion 16 for obtaining information indicating a relative position of the mark 4 of the die 2 and the marks 5 on the substrate 1 corresponding to the target transfer position from a detecting portion 9, while aligning the die 2 and the substrate 1, so as to transfer the pattern at the target transfer position, and controlling the relative position of the mark 4 of the die 2 and the marks 5 on the substrate 1 corresponding to the target transfer position of the substrate to be a relative position in an aligning state, while the die 2 and the transfer material are pressed at the target transfer position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
