发明名称 |
FAULT TOLERANT ION SOURCE POWER SYSTEM |
摘要 |
The presently disclosed technology provides a responsive ion beam source power supply system (200, 300, 400) capable of handling fault events without relying on conventional protection circuitry (e.g., fuses and breakers) so that physical power supply hardware intervention by a user is minimized for typical fault conditions and the ion beam source power supply system (200, 300, 400) may recover automatically after experiencing a fault condition. The presently disclosed technology further discloses an ion beam source power supply system (200, 300, 400) capable of detecting and diagnosing fault states, autonomously implementing command decisions to preserve or protect the function of other ion source modules or sub-systems, and/or mitigating or recovering from the disruptive fault event and returning the ion beam source system (100) to desired user settings. |
申请公布号 |
WO2012054390(A2) |
申请公布日期 |
2012.04.26 |
申请号 |
WO2011US56546 |
申请日期 |
2011.10.17 |
申请人 |
VEECO INSTRUMENTS, INC.;HANSEN, DENNIS;DEAKINS, JAMES;CAMUS, CURTIS |
发明人 |
HANSEN, DENNIS;DEAKINS, JAMES;CAMUS, CURTIS |
分类号 |
H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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