| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that concentrations of alcohol and water in a cleaning agent including a composition composed of fluorocarbon, alcohols (mainly, ethanol and isopropanol) and a slight amount of water need to be controlled from the viewpoint of preventing spot generation in a drainage step, and to provide a measuring device with sufficient accuracy other than a specific gravity meter. <P>SOLUTION: The measuring device includes: flowing a cleaning solvent in/outside a silicon tube; flowing a high-concentration salt electrolyte solution as an extraction solvent outside/in the silicon tube; and specifying the amounts of alcohol and water which are obtained by extraction through a silicon film by impedance comparison with the high-concentration salt electrolyte solution before the extraction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
