| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately detect a fault regardless of the shape of a surface of an inspection object and the fault. <P>SOLUTION: Two or more kinds of pattern lights having at least cross-shaped and ring-shaped irradiation patterns produced on a surface of an inspection object are emitted on the surface of the inspection object from a light-emitting portion 601. The pattern lights are emitted on the surface of the inspection object while scanning in a predetermined direction. On the other hand, an imaging portion 602 shoots an image including the irradiation pattern produced by the emitted pattern lights, and an image processing portion 603 detects a fault on the surface of the inspection object on the basis of changes of the shape of the irradiation pattern included in the shot image. <P>COPYRIGHT: (C)2012,JPO&INPIT |
