发明名称 |
APPARATUS FOR FORMING A MAGNETIC FIELD AND METHODS OF USE THEREOF |
摘要 |
Apparatus for forming a magnetic field and methods of use thereof are provided herein. In some embodiments, a plurality of coils having substantially similar dimensions disposed about a process chamber in a symmetric pattern centered about a central axis of the process chamber, wherein the plurality of coils are configured to produce a magnetic field having a plurality of magnetic field lines that are substantially planar and substantially parallel. In some embodiments, the plurality of coils comprises eight coils disposed about the process chamber, wherein each of the eight coils is offset by an angle of about 45 degrees from respective adjacent coils of the eight coils.
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申请公布号 |
US2012097870(A1) |
申请公布日期 |
2012.04.26 |
申请号 |
US201113097800 |
申请日期 |
2011.04.29 |
申请人 |
LERAY GARY;RAUF SHAHID;TODOROW VALENTIN N.;APPLIED MATERIALS, INC. |
发明人 |
LERAY GARY;RAUF SHAHID;TODOROW VALENTIN N. |
分类号 |
G21K1/093;C23F1/08;H05H1/04 |
主分类号 |
G21K1/093 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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