| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of selectively emitting both of exposure lights of linear polarization of P-polarized light and linear polarization of S-polarized light without increasing the size of the whole device. <P>SOLUTION: An exposure device 1 includes a polarization beam splitter 15 for dividing exposure light from a light source 11 into exposure lights of linear polarization of P-polarized light and linear polarization of S-polarized light. The polarization beam splitter 15 is provided to be rotatable using an optical axis of the exposure light as a rotation center, and the direction of a reflection-transmitting face in relation to the rotation center is configured to be allowed to be set to a first position and a second position which are different by 90°. By switching the position of the polarization beam splitter 15 to the first position or the second position, both of the exposure light of the linear polarization of the P-polarized light and the linear polarization of the S-polarized light can be selectively emitted. <P>COPYRIGHT: (C)2012,JPO&INPIT |
