| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card transfer apparatus that imposes no weight load on an operator and causes no damage to an inspection needle part of a probe card. <P>SOLUTION: Probe card pickup means 4 provided for picking up a probe card 1 from probe card feed means 2 comprises: a vertical drive part 10 for the probe card 1; two filaments 8 connected at respective ends to suspension parts 7 in two diametrally opposite positions of the probe card 1 and fixed at the other ends to two diametrally opposite positions of the vertical drive part 10 spaced at a larger interval than the suspension parts 7 on the probe card 1; guides guiding the filaments 8 from inside the tracks thereof; a platform supporting the guides; and platform drive means for vertically moving the platform relative to the vertical drive part 10. The filaments 8 are stretched outward by the guides to align the center of the suspended probe card 1 with the center of the vertical drive part 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
