| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a texture for a substrate surface with a simple method. <P>SOLUTION: In this method, a photosensitive resist layer is formed on a transparent conductive film of a transparent substrate. A catoptric light having a speckle pattern is generated by radiating light with high coherency emitted from a light source to a scattering plate, and the photosensitive resist layer is exposed and developed by radiating the catoptric light from the scattering plate, and a texture having an uneven pattern corresponding to the speckle pattern is formed through etching. <P>COPYRIGHT: (C)2012,JPO&INPIT |
