发明名称 |
DEFECT CLASSIFICATION SYSTEM, DEFECT CLASSIFICATION DEVICE, AND IMAGE PICKUP DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To improve a classification performance and an operability of a system in the defect classification system using a plurality of types of observation devices for acquiring images with different properties. <P>SOLUTION: This defect classification system includes: a plurality of image pickup means for capturing images of a test object; a defect classification device for classifying the images acquired by the image pickup means; and transmission means for performing data transmission between the plurality of image pickup means and the defect classfication device. The defect classification device includes: image storage means for storing image data acquired from the image pickup means; information storage means for storing accompanying information related to the input image data; and means for changing an image processing mode or an image display mode according to the accompanying information. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012083147(A) |
申请公布日期 |
2012.04.26 |
申请号 |
JP20100228078 |
申请日期 |
2010.10.08 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
NAKAGAKI AKIRA;HARADA MINORU;HIRAI TOMOHIRO |
分类号 |
G01N23/225;H01L21/66 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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