| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a buffer layer on a photoelectric conversion semiconductor layer without dissolving a substrate even if a part of the substrate is soluble in a CBD solution. <P>SOLUTION: Substrates are fixed from the outside of a reaction tank 2 for a CBD, over apertures 3 smaller than the substrates provided on wall surfaces of the reaction tank 2, so as to cover the whole apertures 3. Buffer layers are deposited in a region facing the apertures 3 on surfaces of photoelectric conversion semiconductor layers provided on the substrates. <P>COPYRIGHT: (C)2012,JPO&INPIT |
