PIEZOELECTRIC ELEMENT, DROPLET JETTING HEAD, DROPLET JETTING APPARATUS, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element or the like with improved reliability.

SOLUTION: The piezoelectric element according to the present invention includes: a diaphragm 10 having a first recess 14 on a first surface 16; a first electrode 20 which is formed in the first recess 14 and has a second recess 26 formed on an upper surface thereof; a piezoelectric layer 30 formed on the diaphragm 10 and the first electrode 20; and a second electrode 40 formed on the piezoelectric layer 30.

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