| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a focus detection device having an improved focus detection accuracy, and to provide a method for detecting the focus. <P>SOLUTION: This focus detecting device includes: light projection means for projecting light to a specimen via an objective lens; drive means for changing a relative position between a stage on which the specimen is placed and the objective lens; light detecting means for detecting the intensity of the reflected light from the specimen side via the objective lens; signal generation means for generating a focus signal based on the light intensity detected according to the relative position; acquisition means for acquiring a correction value caused by the objective lens; signal correction means for correcting the focus signal according to the correction value and generating a corrected focus signal; focus position detecting means for detecting a focus position based on the corrected focus signal. This focus position detecting device can remove the influence of aberration and flare caused by the objective lens to solve the problem. <P>COPYRIGHT: (C)2012,JPO&INPIT |
