| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical deflector capable of oscillating a movable part with low driving force. <P>SOLUTION: An optical deflector comprises: a substrate; a movable part 220 having a flat plate shape; a projection 241a which is connected to an end 242a of the movable part 220; a projection 241b which is connected to an end 242b of the movable part 220, having a central axis 240 identical to the projection 241a; a regulation part 250a which is arranged on the substrate and surrounds periphery of the central axis 240 of the projection 241a; a regulation part 250b which is arranged on the substrate and surrounds periphery of the central axis 240 of the projection 241b; and fixed electrodes 204a and 204b which oscillate the moving part 220. The regulation part 250a supports the projection 241a and the regulation part 250b supports the projection 241b, so that the movable part 220 is supported to be oscillated around the central axis 240 at a remote position above the substrate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
