| 摘要 |
Target for the deposition of solid solution layers comprising at least two different metals on a substrate by means of arc physical vapour deposition (arc PVD), wherein the target comprises at least two different metals. In order to produce solid solution layers which are as free as possible of macroparticles (droplets), according to the invention at least the metal with the lowest melting temperature is present in the target in a ceramic compound, specifically as a metal oxide, metal carbide, metal nitride, metal carbonitride, metal oxynitride, metal oxycarbide, metal oxycarbonitride, metal boride, metal boronitride, metal borocarbide, metal borocarbonitride, metal borooxynitride, metal borooxocarbide, metal borooxocarbonitride, metal oxoboronitride, metal silicate or a mixture thereof, and at least one metal which differs from the metal with the lowest melting temperature is present in the target in elemental (metallic) form. |
