VACUUM PUMP

摘要

Provided is a vacuum pump for which the substrate wiring is simple and for which the substrate can be cooled easily. A plate (201) is provided so as to cover an aperture in the casing on the pump main body (100) side, and this plate (201) is constructed as a substrate unit which also serves as a casing on the control unit (200) side. An AMB control substrate (209) and an atmosphere-side connecting plate (211) are directly soldered to and integrated with the pins (207) of a terminal (210), which are affixed so as to pass through the plate (201). Accordingly, the casing portion and the sealing structure can be formed in a simple manner. Therefore, a water-resistant structure can be formed with the inexpensive terminal (210) without requiring expensive water-resistant connectors (1) and (3). In addition, by cooling this plate (201) the electrical components mounted respectively on the AMB control substrate (209) on the vacuum side and on the atmosphere-side connecting substrate (211) on the atmosphere side can be cooled simultaneously.