摘要 |
<P>PROBLEM TO BE SOLVED: To improve the yield of an acoustic wave element. <P>SOLUTION: An acoustic wave element 1 of the present invention comprises: a piezoelectric substrate 2; an IDT electrode 3 provided on the piezoelectric substrate 2; a side wall 5 provided around the IDT electrode 3 on the piezoelectric substrate 2; a lid 7 provided on the side wall 5 so as to cover a space on the IDT electrode 3; and an adhesive layer 6 provided between the lid 7 and the side wall 5 and made of an adhesive. An upper surface of the side wall 5 has a groove 25, and the groove 25 is filled with the adhesive, thereby the amount of adhesive extruded can be reduced. <P>COPYRIGHT: (C)2012,JPO&INPIT |