| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric inspection method for pseudo contact and an electric inspection apparatus for surely inspecting the pseudo contact state between a terminal, etc. of an element and solder. <P>SOLUTION: An electric inspection apparatus 1 for pseudo contact electrically inspects the pseudo contact state of a semiconductor element 11 bonded by solder 12 to a circuit board 2. The electric inspection apparatus 1 includes a pressurization jig 26 and a positive pressure/negative pressure generator 32 for selectively supplying positive pressure and negative pressure to the semiconductor element 11 bonded by the solder 12 to the circuit board 2, a probe pin 4 and a measurement device 31 for continuously measuring the electrical characteristics of the semiconductor element 11 when the positive pressure and the negative pressure are alternately supplied to the semiconductor element 11, and a control device 33 for determining the presence or absence of the pseudo contact based on the measured electrical characteristics. <P>COPYRIGHT: (C)2012,JPO&INPIT |
