| 发明名称 |
SYSTEM AND METHODS RELATED TO GENERATING ELECTROMEGNETIC RADIATION INTERFERENCE PATTERNS |
| 摘要 |
Systems and methods related to the generation of interference patterns using electromagnetic radiation are generally described. Some embodiments are directed to the use of such systems and methods to perform interference lithography.
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| 申请公布号 |
US2012099090(A1) |
申请公布日期 |
2012.04.26 |
| 申请号 |
US20100959128 |
申请日期 |
2010.12.02 |
| 申请人 |
BERGGREN KARL K.;KORRE HASAN;FUCETOLA COREY P.;MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
BERGGREN KARL K.;KORRE HASAN;FUCETOLA COREY P. |
| 分类号 |
G03B27/42;G02B27/10;G02B27/46 |
主分类号 |
G03B27/42 |
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