| 发明名称 |
METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY |
| 摘要 |
Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus.
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| 申请公布号 |
US2012097661(A1) |
申请公布日期 |
2012.04.26 |
| 申请号 |
US20100910347 |
申请日期 |
2010.10.22 |
| 申请人 |
SINGH HARMEET;LAM RESEARCH CORPORATION |
发明人 |
SINGH HARMEET |
| 分类号 |
H05B3/68 |
主分类号 |
H05B3/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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