A SURFACE ROUGHNESS MEASUREMENT METHOD AND SETUP

摘要

This invention is related to a method and setup for measuring surface roughness and waviness, also determining straightness error of the carriage and other means of the setup, by using interference phenomenon. In this invention, a surface to be analyzed and an interferometer interacting with said surface, being displaced relative to each other are used. Using the interference fringes obtained during the displacement along a particular direction (this particular direction is named as direction in this document after this point), the surface profile of the surface along the projection of the direction of progress is determined.