| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a substrate from being dissolved even if it is the substrate which includes a portion such that a CBD film forming device is dissolved into a CBD solution. <P>SOLUTION: The CBD film forming device includes: a support heating part 3 by which the substrate 2 is supported from a rear face and heated; a reaction tank 4 having an opening 4a for supplying a CBD reaction solution for film formation to a surface of the substrate 2 supported by the support heating part 3; and a reaction tank advancing/retreating drive unit which presses the opening 4a to the surface of the substrate 2 by advancing the reaction tank 4 toward the surface of the substrate 2 supported by the support heating part 3 and separates the opening 4a from the surface of the substrate 2 by retreating the reaction tank 4 from the surface of the substrate 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
