发明名称 ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, LIQUID CRYSTAL DISPLAY
摘要 Embodiments of the disclosed technology relates to an array substrate, a manufacturing method thereof and a liquid crystal display. The method comprises: forming a gate metal film, applying photoresist on the gate metal film, patterning to form a gate line, a gate electrode and a gate line leading wire, and remain a part of photoresist on the gate line leading wire; sequentially depositing a gate insulating film, an active layer film and a source/drain metal film, applying photoresist on the source/drain metal film and patterning to form source/drain electrodes and a channel; lifting off the remained photoresist, the gate insulating film and the photoresist above the gate line leading wire; and then forming a protection layer and a pixel electrode.
申请公布号 US2012099058(A1) 申请公布日期 2012.04.26
申请号 US201113278391 申请日期 2011.10.21
申请人 QIN WEI;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 QIN WEI
分类号 G02F1/1335;H01L21/8234;H01L27/105 主分类号 G02F1/1335
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