METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE SUBSTRATES WITH SURFACE ELECTRODES, AND METHOD FOR PRODUCING THIN-FILM SOLAR CELLS

摘要

A transparent conductive substrate with surface electrode (11b), formed by sputtering a zinc oxide crystalline transparent conductive film (uneven film (22)), which has an uneven structure (2a) formed on the surface, on a translucent glass substrate (1) as a surface electrode (2), is treated with heat at 400 to 550°C in a hydrogen gas atmosphere of 0.1 to 100 Pa. As a result, a surface electrode (2) with a higher light-trapping effect can be provided, and a thin-film solar cell (10) with higher photoelectric conversion efficiency can be obtained.