| 发明名称 |
COATING APPARATUS AND COATING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To uniformly apply a liquid body onto a substrate. <P>SOLUTION: A coating apparatus includes a coating part having a nozzle ejecting the liquid body containing an easily oxidizable metal from the tip part and a relatively moving part relatively moving the substrate and the nozzle so that the tip part is passed on the substrate. An affinity adjusting part formed so that the affinity between the liquid body and the affinity adjusting part is made weaker than the affinity between the liquid bodies is provided at least at the tip part of the nozzle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012081428(A) |
申请公布日期 |
2012.04.26 |
| 申请号 |
JP20100230573 |
申请日期 |
2010.10.13 |
| 申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
MIYAMOTO HIDENORI;HIRAKAWA TADAHIKO;MISUMI KOICHI |
| 分类号 |
B05C5/00;B05D1/26;B05D7/24;H01L31/04 |
主分类号 |
B05C5/00 |
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