| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus suitable for obtaining high purity argon with a high recovery rate while reducing energy which gas purification takes. <P>SOLUTION: The method includes: a PSA gas separation step which performs a cycle including: a pretreatment process which makes an argon gas G<SB POS="POST">0</SB>containing impurity contact a ruthenium catalyst; an adsorption process which adsorbs the impurity of a gas G<SB POS="POST">1</SB>which has passed through the pretreatment to an adsorbent by a PSA method, and derives a semi-purified gas G<SB POS="POST">2</SB>in which argon has been enriched; a desorption process which desorbs the impurity from the adsorbent, and derives the gas inside a column; and a pressure equalization process which pressure-equalizes the internal pressure between an adsorption column which has passed through the adsorption process and the adsorption column which passed through the desorption process; and a TSA gas separation step which performs a cycle including: an adsorption process by a TSA method in which an adsorbent introduces the semi-purified gas G<SB POS="POST">2</SB>in the state of a low temperature, and adsorbs the impurity to the adsorbent, and derives a purified gas G<SB POS="POST">6</SB>from the semi-purified gas G<SB POS="POST">2</SB>; and a regeneration process which desorbs the impurity from the adsorbent while rising the temperature of the adsorbent, and derives the gas inside the column. <P>COPYRIGHT: (C)2012,JPO&INPIT |
