METHOD OF FORMING A MICRO-STRUCTURE

摘要

A method of forming a micro-structure (100, 100', 100'', 100''') involves forming a multi-layered structure (10) including i) an oxidizable material layer (14) on a substrate (12) and ii) another oxidizable material layer (16) on the oxidizable material layer (14). The oxidizable material layer (14) is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template (16'), including a plurality of pores (18), from the other oxidizable material layer (16), and growing a nano-pillar (20) inside each pore (18). The nano-pillar (18) has a predefined length (L) that terminates at an end (21). A portion of the template (16') is selectively removed to form a substantially even plane (23) that is oriented in a position opposed to the substrate (12). A material is deposited on at least a portion of the plane (23) to form a film layer (22, 22') thereon, and the remaining portion of the template (16') is selectively removed to expose the nano-pillars (20).