| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device in which alignment is performed appropriately from the backside of a substrate with a simple configuration. <P>SOLUTION: The exposure device comprises a substrate stage movable in a two-dimensional direction, a substrate mounting unit 350 which mounts an exposure substrate on a substrate mounting part 360 arranged on the substrate stage and having through holes 362, 363, target marks 378, 398 provided in the through holes 362, 363 of the substrate mounting part 360, and alignment detection systems 370, 390 provided in the substrate mounting unit 350. <P>COPYRIGHT: (C)2012,JPO&INPIT |
