发明名称 Plasmas and methods of using them
摘要 Plasma devices and methods for using such plasma devices in analytical measurements are disclosed. In certain examples, a low flow plasma may be operative using a total argon gas flow of less than about five liters per minute, and in some embodiments, a plasma argon gas flow of less than about four liter per minute. In other examples, a plasma produced using inductive and capacitive coupling is disclosed.
申请公布号 AU2006223254(B2) 申请公布日期 2012.04.26
申请号 AU20060223254 申请日期 2006.03.10
申请人 PERKINELMER, INC. 发明人 MORRISROE, PETER J.
分类号 B23K9/00;B23K10/02;G01J3/30;H01L21/00;H01L21/306;H01L21/336 主分类号 B23K9/00
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