Improvements in or relating to processes for Forming an Insulating Coating on Silicon, and to Coated Silicon

摘要

1,180,908. Ceramic seals. ENGLISH ELECTRIC CO. Ltd. 15 Nov., 1967 [17 Nov., 1966], No. 51549/66. Heading B3V. [Also in Divisions C1 and H1] A silicon body has an insulating coating of a glass-ceramic thermally matched to the silicon and comprising at least 90 % by weight of ZnO 24-53; A-l 2 O 3 9-20; SiO 2 27-45; one of B 2 O 3 . CaO and BaO 5-20, the oxides of the alkali metals, germanium and magnesium being absent. A number of examples of coatings are given. A complementary pair of metaloxide silicon transistors may be bonded together by the glass-ceramic coating. A preoxidized silicon body is coated with a suspension of the glass powder in methylated spirits with or without ammonia and heated in a non-oxidizing and non-reducing atmosphere such as argon to fuse the coating and devitrify the glass.