| 摘要 |
PURPOSE: A manufacturing method of aqueous slurry suspension and aqueous slurry suspension are provided to offer aqueous slurry suspension which can be used in separation of particle, CMP application, and lapping application. CONSTITUTION: A manufacturing method of aqueous slurry suspension comprises a step of manufacturing suspended particles selected from a group consisting of stable gel particle, sol-gel, and gelatinous precipitates in order to precipitate inert particle in carrier media. The carrier media is different from the inert particle and includes about 0.1-60 weight% of suspended particle selected from oxide which forms the suspended particle in the carrier media having pH of 3-12, hydroxide, and oxide hydroxide. The particle is suspended as a result of one of the following reasons: physical interference, density difference, and static charge.
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