发明名称 |
Silica glass crucible and method for pulling up silicon single crystal using the same |
摘要 |
A silica glass crucible causing fewer pinholes in silicon single crystals is provided by a method of preventing pinholes by performing the pulling up of a silicon single crystal while restraining the dissolution rate of the crucible inner surface to 20 μm/hr or less, using a silica glass crucible for the pulling up of silicon single crystals, wherein the area of crystalline silica formed by crystallization of amorphous silica is restricted to 10% or less of the crucible inner surface area, or the density of pits formed from open bubbles on the crucible inner surface is restricted to 0.01 to 0.2 counts/mm2. |
申请公布号 |
US8163083(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US20080169828 |
申请日期 |
2008.07.09 |
申请人 |
KISHI HIROSHI;KANDA MINORU;JAPAN SUPER QUARTZ CORPORATION;SUMCO CORPORATION |
发明人 |
KISHI HIROSHI;KANDA MINORU |
分类号 |
C30B11/00;C30B9/00;C30B15/00;C30B17/00;C30B19/00;C30B21/02;C30B21/06;C30B27/02;C30B28/06;C30B28/10;C30B30/04 |
主分类号 |
C30B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|