| 摘要 |
PURPOSE: A high speed substrate inspection device and a method using the same are provided to improve production efficiency and to reduce manufacturing costs. CONSTITUTION: A high speed substrate inspection device comprises a substrate stage(101), a first light source(123a), a second light source(121), an optical sensor(125), an optical system(110), a focus conformity judgment unit(138) and a focus conformity member(126). The first light source emits a first illuminate light for the focus control in the substrate stage. The second light source emits a second illuminate light for the substrate image acquisition in the substrate stage. The optical system induces the first and second illuminate light to the optical sensor after reflecting to the substrate. The focus conformity judgment unit determines the focus conformity using the laser introduced to the optical sensor.
|
