| 发明名称 |
Sputtered piezoelectric material |
| 摘要 |
Piezoelectric actuators having a composition of Pb1.00+x(Zr0.52Ti0.48)1.00−yO3Nby, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator. |
| 申请公布号 |
US8164234(B2) |
申请公布日期 |
2012.04.24 |
| 申请号 |
US20090393644 |
申请日期 |
2009.02.26 |
| 申请人 |
LI YOUMING;BIRKMEYER JEFFREY;FUJIFILM CORPORATION |
发明人 |
LI YOUMING;BIRKMEYER JEFFREY |
| 分类号 |
H01L41/087 |
主分类号 |
H01L41/087 |
| 代理机构 |
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代理人 |
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| 主权项 |
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