发明名称 Vapour deposition method
摘要 In a vapor deposition method which can be used to deposit mixtures of materials in progressively varying amounts on a substrate (1) and which can be used for a variety of purposes, but is of especial value in combinatorial chemistry, the path of the vaporized material from the source (3) to the substrate (1) is partially interrupted by a mask (5), the positioning of the mask in a plane parallel to the plane defined by the substrate (1) being such that the material is deposited on the substrate (1) in a thickness which increases substantially continuously in a direction along the substrate (1).
申请公布号 US8163337(B2) 申请公布日期 2012.04.24
申请号 US20040575240 申请日期 2004.10.08
申请人 GUERIN SAMUEL;HAYDEN BRIAN ELLIOT;UNIVERSITY OF SOUTHAMPTON 发明人 GUERIN SAMUEL;HAYDEN BRIAN ELLIOT
分类号 C23C16/00;C23C14/04;C23C14/22;C23C16/04 主分类号 C23C16/00
代理机构 代理人
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