发明名称 |
Method and apparatus for controlling topographical variation on a milled cross-section of a structure |
摘要 |
An improved method of controlling topographical variations when milling a cross-section of a structure, which can be used to reduce topographical variation on a cross-section of a write-head in order to improve the accuracy of metrology applications. Topographical variation is reduced by using a protective layer that comprises a material having mill rates at higher incidence angles that closely approximate the mill rates of the structure at those higher incidence angles. Topographical variation can be intentionally introduced by using a protective layer that comprises a material having mill rates at higher incidence angles that do not closely approximate the mill rates of the structure at those higher incidence angles. |
申请公布号 |
US8163145(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US20090607867 |
申请日期 |
2009.10.28 |
申请人 |
NADEAU JAMES P;ZOU PEI;ARJAVAC JASON H.;FEI COMPANY |
发明人 |
NADEAU JAMES P;ZOU PEI;ARJAVAC JASON H. |
分类号 |
C23C14/34;G11B5/31 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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