发明名称 |
Magnetic lens, method for focusing charged particles and charged particle energy analyzer |
摘要 |
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system. |
申请公布号 |
US8164066(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US20100837857 |
申请日期 |
2010.07.16 |
申请人 |
BARNARD BRYAN;GLENISTER CHRISTOPHER;VG SYSTEMS LIMITED |
发明人 |
BARNARD BRYAN;GLENISTER CHRISTOPHER |
分类号 |
H01J37/145;G21K5/10;H01J37/14 |
主分类号 |
H01J37/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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