| 摘要 |
PURPOSE: A stage apparatus and a prober apparatus is provided to improve safety by maintaining good balance of a stage apparatus structure. CONSTITUTION: A stage apparatus comprise a table part(12), first and second inclined parts(14,18), a supporting part(13), and a driving part(21). The table part moves to a base(11) in a perpendicular direction. The first inclined part is extended obliquely to a horizontal plane. The second inclined part is extended obliquely to the opposite direction of the first inclined part. The supporting part supports the table part through the second inclined part. The supporting part moves along the first and the second inclined part.
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