发明名称 Regulating device, exposure apparatus and device manufacturing method
摘要 The present invention is a regulating device configured to regulate a temperature T2 of a first medium in accordance with a target temperature. The regulating device comprises a heat exchanger 16, a control valve 14, temperature sensors 2 and 4, temperature sensors 6 and 8, and a heat quantity control unit 30 and a temperature control unit 50 configured to calculate a target exchange heat quantity in the heat exchanger 16, calculate an exchange heat quantity in the heat exchanger 16, add a signal dependent upon a difference between the target exchange heat quantity and the exchange heat quantity to a signal dependent upon a difference between an output of the temperature sensor 4 and the target temperature, and control the control valve 14 so that a difference between the output of the temperature sensor 4 and the target temperature is reduced.
申请公布号 US8164735(B2) 申请公布日期 2012.04.24
申请号 US20090397014 申请日期 2009.03.03
申请人 OKADA YOSHIYUKI;CANON KABUSHIKI KAISHA 发明人 OKADA YOSHIYUKI
分类号 G03B27/32;G03B27/52;G05D23/00 主分类号 G03B27/32
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