发明名称 Liquid ejection head and manufacturing method thereof
摘要 A liquid ejection head includes a flow channel-forming substrate having a plurality of pressure-generating chambers communicated with nozzles for ejecting droplets, the pressure-generating chambers being arranged in parallel with each other; a plurality of pressure-applying units for applying pressure to interiors of the pressure-generating chambers; and a joining substrate joined onto one surface of the flow channel-forming substrate. The flow channel-forming substrate includes a silicon single crystal substrate having a (110) plane orientation and has a side surface extending in a longitudinal direction of the pressure-generating chambers, the side surface being composed of a first (111) plane perpendicular to a (110) plane. The joining substrate includes a silicon single crystal substrate having a (110) plane orientation and is joined onto the flow channel-forming substrate so that a first (111) plane of the joining substrate perpendicular to the (110) plane intersects the first (111) plane of the flow channel-forming substrate.
申请公布号 US8162448(B2) 申请公布日期 2012.04.24
申请号 US20090371448 申请日期 2009.02.13
申请人 MIYATA YOSHINAO;SEIKO EPSON CORPORATION 发明人 MIYATA YOSHINAO
分类号 B41J2/045 主分类号 B41J2/045
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