发明名称 Kit for the assembly of a process reactor for the formation of metallic layers on one or more substrates, and method of using the same
摘要 Kit for building a processing reactor for electrolytic deposition of metals on substrates (2) comprises a reactor vessel (3);#a substrate holder (6) near the vessel outlet (4);#an overflow (8);#a trap (10) for liquid from the overflow and a system for feeding it back into the reactor; and#an anode. In addition it contains one or more a flow guide (S);#an electric field adjusting system;#an auxiliary electrode (H);#a screen (B) for directing the field; and an annular sleeve (R) for reducing the diameter of the reactor. An independent claim is included for a method for electrolytic deposition of metals on substrates using the kit to build the reactor vessel.
申请公布号 KR101133085(B1) 申请公布日期 2012.04.24
申请号 KR20087023897 申请日期 2007.12.10
申请人 发明人
分类号 C25D17/02;C25D5/08;C25D21/18 主分类号 C25D17/02
代理机构 代理人
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