发明名称 Metal wiring of semiconductor device and forming method thereof
摘要 The present invention relates to a metal wiring of a semiconductor device and a method for the same, and is directed to disclose a technique forming an additional conductive layer within the metal line, which acts as an etching barrier to increase the etching margin and to improve the RC characteristics between the metal lines, which can prevent the Cu migration.
申请公布号 US8164193(B2) 申请公布日期 2012.04.24
申请号 US20090648241 申请日期 2009.12.28
申请人 PARK KANG TAE;HYNIX SEMICONDUCTOR INC. 发明人 PARK KANG TAE
分类号 H01L23/48;H01L21/4763 主分类号 H01L23/48
代理机构 代理人
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