发明名称 |
Flow sensors having nanoscale coating for corrosion resistance |
摘要 |
A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor bond pads coupled to the sensing structure. The sensor bond pads include a top metal layer on a metal diffusion barrier layer including a metal diffusion barrier layer sidewall. Bond wires couple the sensor bond pads to the substrate bond pads. A housing including sides and a top portion is around the flow sensor and includes a flow channel having an inlet and an outlet. A multi-layer corrosion protection coating includes a nm scale adhesion layer and a self assembled monolayer (SAM) is on the adhesion layer. The protection coating covers the sensor bond pads including the metal diffusion barrier layer sidewall.
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申请公布号 |
US8161811(B2) |
申请公布日期 |
2012.04.24 |
申请号 |
US20090641460 |
申请日期 |
2009.12.18 |
申请人 |
BECK SCOTT E.;BEY PAUL P.;SPELDRICH JAMIE;JAVVAD QASIMI MOHAMMED A.;HONEYWELL INTERNATIONAL INC. |
发明人 |
BECK SCOTT E.;BEY PAUL P.;SPELDRICH JAMIE;JAVVAD QASIMI MOHAMMED A. |
分类号 |
G01F1/68 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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