APPARATUS FOR CHUCKING SUBSTRATE

摘要

PURPOSE: A substrate chucking apparatus is provided to simply comprise a substrate processing device by supporting a substrate with a mask. CONSTITUTION: A substrate is supported on one side of a first plate(110). A vacuum groove(115) opened with a lattice type is formed on the upper side of the first plate. A second plate(130) is downwardly separated from the first plate. A sidewall(170) is supported in the edge of the second plate. A step(171) is formed on the inner side of the sidewall. A chucking member(191) is installed on one side of the first plate.