| 摘要 |
PURPOSE: A graphene sheet manufacturing method and a manufacturing device thereof are provided to manufacture multilayer graphene sheet structures by using graphene sheets such as a carbon nanotube or a secondary battery, etc. and to freely control a size and a shape of the graphene sheets. CONSTITUTION: The graphene sheet manufacturing device carries out a deposition process in a process chamber. A susceptor is formed within in the process chamber. In susceptor, a plurality of substrates is settled to be revolvable. An emission unit is formed on the top of the susceptor to be faced against the substrate. The emission unit offers a catalyst source to form a catalyst layer on the substrate and a carbon source to form a graphene layer. A gas controller is formed in the emission unit. The gas controller controls to selectively offer the catalyst source and the carbon source. The catalyst layer and the graphene layer are evaporated in-situ by using an atomic layer deposition.
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