| 摘要 |
PURPOSE: A cassette centering apparatus is provided to reduce the direct contacts between a cassette and the cassette centering apparatus, thereby minimizing particles. CONSTITUTION: A movable frame(120) is separated from one side of a fixing frame. The fixing frame supports the movable frame and a pressurization supporting unit(150). A connection unit(130) connects the fixing frame with a horizontal frame. An elastic member centers a cassette. The pressurization supporting unit pressurizes and supports the cassette in a direction in which the cassette is centered.
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