SILVER THIN-FILM SPREAD APPARATUS BY MEANS OF DEPOSITION OF NANO METALLIC SILVER

摘要

PURPOSE: A nano-silver thin film forming apparatus based on the deposition of nano-metallic silver is provided to uniformly form a nano silver thin film by spraying metallic silver of nano sizes by pre-set times on the entire surface of a substrate. CONSTITUTION: A processing booth(100) includes an inlet(110) and an outlet(120). A substrate enters through the inlet, and the substrate is discharged through the outlet. A transferring unit(200) is arranged at the lower side of the processing booth and transfers the substrate. A spraying unit(300) is arranged on the upper side of the processing booth and sprays a silver solution on the surface of the substrate. A moving unit(400) linearly moves the spraying unit. A rotating unit(500) rotates the substrate by being arranged at the lower side of the processing booth. A first door(130) and a second door(140) are installed at the inlet and the outlet of the processing booth. A temperature and humidity controlling unit and an exhausting unit are further installed for the processing booth.