发明名称 MICRO-BUBBLE GENERATING DEVICE AND SILICON WAFER CLEANING APPARATUS
摘要 A micro-bubble generating device, comprising: a micro-bubble generating mechanism generating a micro-bubble; and a leading conduit connected to the micro-bubble generating mechanism in order to lead out the micro-bubble generated by the micro-bubble generating mechanism, wherein the micro-bubble generating mechanism is provided with a nozzle which spouts the micro-bubble outside, and the leading conduit is provided with a widening section and a tube part communicating mutually, and the widening section is larger than the tube part in a flow passage sectional area of the micro-bubble, and the micro-bubble generating mechanism is connected to the widening section.
申请公布号 KR101136278(B1) 申请公布日期 2012.04.20
申请号 KR20090115163 申请日期 2009.11.26
申请人 发明人
分类号 H01L21/302;H01L21/304 主分类号 H01L21/302
代理机构 代理人
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