| 摘要 |
<p>A device for quantifying the degassing of a piece of equipment placed in a vacuum chamber includes a metal blade made from a ferromagnetic material including a fixed end and a free end, the blade being provided with a cooling device and a device for measuring an intrinsic temperature of the blade; an electromagnet for exciting the blade; and a measurement sensor for measuring the excitation of the free end of the blade connected to a device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a device for calculating a surface density of a mass deposited on the blade.</p> |
