| 摘要 |
PURPOSE: A substrate inspecting apparatus is provided to improve yield by preventing a defective substrate. CONSTITUTION: A stage(120) is installed on the upper side of a support frame(110). The stage receives or floats a substrate. A substrate transfer module(130) moves the substrate along the upper side of the stage. A top inspecting module(140) includes a first reflection inspection camera(141), a transmission inspection camera(142), and a top review camera(143). A bottom inspecting module(150) includes a bottom review camera(152) which precisely inspects the bottom of the substrate with a second reflection inspection camera(151).
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